JPS63735B2 - - Google Patents
Info
- Publication number
- JPS63735B2 JPS63735B2 JP53004910A JP491078A JPS63735B2 JP S63735 B2 JPS63735 B2 JP S63735B2 JP 53004910 A JP53004910 A JP 53004910A JP 491078 A JP491078 A JP 491078A JP S63735 B2 JPS63735 B2 JP S63735B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electrons
- minute
- cma
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001228 spectrum Methods 0.000 claims description 16
- 238000000682 scanning probe acoustic microscopy Methods 0.000 claims description 14
- 238000000691 measurement method Methods 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 19
- 238000000034 method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 108010083687 Ion Pumps Proteins 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001941 electron spectroscopy Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP491078A JPS54139593A (en) | 1978-01-19 | 1978-01-19 | Measuring method of auger electron spectral spectra |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP491078A JPS54139593A (en) | 1978-01-19 | 1978-01-19 | Measuring method of auger electron spectral spectra |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60175368A Division JPS6150045A (ja) | 1985-08-09 | 1985-08-09 | オージエ電子分光スペクトル測定方法 |
| JP62118680A Division JPS62294948A (ja) | 1987-05-14 | 1987-05-14 | オ−ジェ電子分光スペクトルの測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54139593A JPS54139593A (en) | 1979-10-30 |
| JPS63735B2 true JPS63735B2 (en]) | 1988-01-08 |
Family
ID=11596787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP491078A Granted JPS54139593A (en) | 1978-01-19 | 1978-01-19 | Measuring method of auger electron spectral spectra |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54139593A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02256405A (ja) * | 1989-03-29 | 1990-10-17 | Copal Electron Co Ltd | パワーチャック |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5923444A (ja) * | 1982-07-30 | 1984-02-06 | Hitachi Ltd | 走査型反射電子回折顕微装置 |
-
1978
- 1978-01-19 JP JP491078A patent/JPS54139593A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02256405A (ja) * | 1989-03-29 | 1990-10-17 | Copal Electron Co Ltd | パワーチャック |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54139593A (en) | 1979-10-30 |
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